常熟Super High Resolution Field Emission Scanning Electron Microscope Regulus Series

Classification:常熟Field emission scanning electron microscope (FE-SEM)
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Date of issue:2021-11-18 11:33:05

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The "Regulus Series" inherits the observation and analysis performance of the existing models. Equipped with the low-noise cold-field emission electron gun of the SU8200 series*1, a highly stable beam can be obtained. By optimizing the electronic optical system, the resolution of Regulus 8240/8230/8220 is increased to 0.7 nm under 1 kV conditions, and the resolution of Regulus 8100 is increased to 0.8 nm.

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Observation example

image.png The cold field emission electron gun of the "SU8200 series" is used*2

image.png The high-brightness and stable area that appears after the flashing of the electron beam is used as the stable observation interval, which enables high-resolution observation and analysis performance under low accelerating voltage conditions.

image.png (Regulus8240/8230/8220: 0.7 nm/1 kV, Regulus8100: 0.8 nm/1 kV)

image.png Use a low-pollution, high-vacuum sample chamber

image.png Using energy filter (optional), you can observe the contrast of multiple components*2

◆ High resolution observation under extremely low landing voltage