The navigation system can correspond the wiring of CAD data and the design graphics of large-scale integrated circuits with the observation images of FIB. When the coordinate position in the CAD system is specified, the sample stage will move to the corresponding position through the link, and the SIM image of the corresponding position can be obtained. At the same time, CAD data and SIM images can also be displayed overlaid. Therefore, it is easy to check the status of the lower layer wiring, which substantially improves the efficiency of the analysis and facilitates further repair work.