◆ 1. Environmental control function (atmosphere, vacuum, liquid, temperature control, etc.)
The AFM5300E can realize a high vacuum test environment, greatly reducing the influence of water adsorbed on the sample surface on the test, and realizing accurate physical property measurement. A wider range of temperature control can be achieved in a vacuum environment.
(Patent No. 3857581, Patent No. 3926638)
●In the atmosphere ●In liquid ●In vacuum ●Special atmosphere (flow control)
●Temperature control Heating and cooling (-120~300℃), high temperature (room temperature~800℃)
●Humidity control (0~80%)
◆ 2. Simple operation (comprehensive Holder Flange)
By adopting the "comprehensive Holder Flange opening and closing function", the replacement of samples and scanners is more convenient, and at the same time, the optical axis adjustment required after the sample replacement of the previous environmental SPM is eliminated. It also saves the bracket replacement link when the test mode is switched.
◆ 3. Excellent high performance
The "Swing Cancel function" is adopted to reduce the floating of the sample and reduce the drift. Improved the performance of nano analysis and increased credibility.
◆ 4. Improve the detection accuracy of electrical performance by reducing the impact of surface adsorption of water
The vacuum environment reduces the influence of moisture and pollutants adsorbed on the sample surface, thus realizing high-resolution and high-sensitivity electrical performance analysis.