◆ High-performance electronic optical system
image.png Secondary electron resolution: Top secondary electron detector (2.0 nm at 1kV)*
image.png High sensitivity: High efficiency PD-BSD, super low acceleration voltage performance, imaging as low as 100 V
image.png Large beam current (>200 nA): convenient for efficient micro-area analysis
◆ Excellent performance
image.png Variable pressure: Excellent low vacuum (10 -300 Pa) imaging performance, equipped with high sensitivity low vacuum detector (UVD)*
image.png Quick and easy sample change in opening room (sample size: Φ 200 mm x 80 mmH)
image.png Micro area analysis: EDS, WDS, EBSD, etc.
*: Optional accessories
