南京FIB-SEM three beam system NX2000

Classification:南京Focused ion beam system
Number of Views:162second
Date of issue:2021-11-18 10:53:40

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In the field of evaluation and analysis of cutting-edge equipment and high-performance nanomaterials, FIB-SEM has become an indispensable tool. Recently, the target observation object has become more refined; the preparation requirements for thinner, lower-damage samples have become more prominent.

characteristic
Specifications
option
function
Observation example

◆ Using high contrast, real-time SEM observation and processing endpoint detection functions, ultra-thin samples with a thickness of less than 20 nm can be prepared

Real-time SEM observation during FIB processing *2 cases

Sample: NAND flash memory

Accelerating voltage: 1 kV

FOV: 0.6 µm

◆ The processing direction control technology (Micro-sampling®*3 system (optional) + high-precision/high-speed sample stage*) has high hopes for suppressing the curtain effect and making film samples with uniform thickness.